Experimental Nanomechanics Resources

Thin Film Electrodeposition:

  • Keithley 2420 DC Power supply (max 3A capability) controlled by GPIB card
  • PC acquisition computer
  • Cimarec Hot-plate/stirrer
  • EFFA metal sputter coater (Au, Al, Cr, Cu, Ni)

Atomic Force Microscopy:

  • Quesant universal scanning probe microscope including:
    1. AFM contact, tapping, phase, lateral force, force-depth modes
    2. STM (constant current or constant height)
    3. Sample-heater stage (up to 300 oC)
    4. Open and closed liquid cells
    5. Metrology 3D closed-loop scanner (40 X 40 microns)
Atomic Force/Scanning Tunneling Microscope

Sample and Tip Preparation:

  • Buehler Ecomet3000 grinder/polisher with SiC paper grit 60 to 1200, and soft clothes including 0.25, 1, 3 and 9 microns diamond suspension fluids.
  • House-made electroetcher for STM tip preparation.
  • EMS ultrasonic bath with timer and heater.
  • Various sample preparation equipments

Electron Microscopy:

  • JEOL JSM 6060 scanning electron microscope with measurement scaler (max magnification X300,000).
Scanning Electron Microscope

Other Resources:

Microfabrication Facilities in the College of Engineering and Mathematics

  • SBT 2000 reactive ion etcher
  • K&S wedge bounder
  • Webb high-vacuum furnace
  • SBT diamond wire saw
  • SYST positive pressure laminar flow fume hood
  • Cyberoptics laser profilometer
  • Karl Suss MJB3 mask aligner
  • Laurell spin-coater with Shippley positive photoresist
  • Nikon optical comparator
  • Masks are made off-campus

Cell Imaging Facility of the College of Medicine:

  • JEOL 1210 transmission electron microscope with 32 bit internal microprocessor for instrument control; a Kodak MegaPlus high resolution video camera for digital image acquisition; and advanced image processing software (Image ProPlus). A Princeton Gamma Tech IMIX Microanalysis System is attached to this JEOL electron microscope for elemental analysis of specimens.
  • Olympus BX50 research microscope for transmitted light, phase contrast, and epi-fluorescence microscopy. This microscope contains objective lenses of 4X, 10X, 20X, 40X and 100X , and bandpass filters for ultraviolet, blue and green fluorescence emissions.
© 2005, F. Sansoz - The University of Vermont - Burlington, VT, 05405